Silicon micropillars: High stress plasticity

Rabier, J.; Montagne, A.; Wheeler, J. M.; Demenet, J. L.; Michler, J.; Ghisleni, R.

Physica Status Solidi (C) Current Topics in Solid State Physics 10 (2013)

Silicon micropillars obtained by FIB from Floating Zone silicon single crystal have been deformed in situ in a SEM between room temperature and 400 °C. Pillars with <123> axis were studied in order to promote single slip deformation. Mechanical data as a function of pillar diameter and surface deformation microstructures observed by SEM are reported. Yield stresses as a function of temperature are compared with those resulting from high-pressure tests. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.