Silicon micropillars: High stress plasticity

J. Rabier; A. Montagne; J. M. Wheeler; J. L. Demenet; J. Michler; R. Ghisleni

Physica Status Solidi (C) Current Topics in Solid State Physics 10 (2013) 42309

Silicon micropillars obtained by FIB from Floating Zone silicon single crystal have been deformed in situ in a SEM between room temperature and 400 °C. Pillars with <123> axis were studied in order to promote single slip deformation. Mechanical data as a function of pillar diameter and surface deformation microstructures observed by SEM are reported. Yield stresses as a function of temperature are compared with those resulting from high-pressure tests. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.