The Alemnis Standard Assembly (ASA) can be mounted in-situ in any Scanning Electron Microscope (SEM) which has sufficient free space. The ASA can also be mounted ex-situ at any angle, depending on how it is mounted with a complimentary technique, e.g., vertically for synchrotron beam line.
- Indentation head: piezo actuated indentation head with integrated displacement sensor for closed loop operation. Maximum indentation depth 40 µm, displacement resolution < 1 nm;
- Load sensor: max. force: 0.5 N, typically 4 µN RMS noise;
- Sample versus indentation tip positioning: Piezoelectric XY+Z micro-positioning system for sample positioning and tip approach (26 mm range in X and Y, 26 mm range in Z), with integrated position sensors for closed loop operation (< 2 nm resolution);
- 5 standard stubs;
- all cables and connectors for in air operation.
For integration in SEM, additional modifications may be required, such as custom flanges, cabling, mounts and connectors. This is typically quoted on a case-by-case basis.