The Alemnis Standard Assembly (ASA) can be mounted in-situ in any Scanning Electron Microscope (SEM) which has sufficient free space. The ASA can also be mounted ex-situ at any angle, depending on how it is mounted with a complimentary technique, e.g., vertically for synchrotron beam line.

Main Components:

  • Displacement head: piezo actuated displacement head with integrated displacement sensor for closed loop operation. Maximum displacement 40 µm, displacement resolution < 1 nm;
  • Load sensor: max. force: 0.5 N, typically 4 µN RMS noise;
  • Sample versus indentation tip positioning: Piezoelectric XY+Z micro-positioning system for sample positioning and tip approach (26 mm range in X and Y, 26 mm range in Z), with integrated position sensors for closed loop operation (< 2 nm resolution);
  • 5 standard stubs;
  • all cables and connectors for in air operation.

For integration in SEM, additional modifications may be required, such as custom flanges, cabling, mounts and connectors. This is typically quoted on a case-by-case basis.

ASA being prepared and used inside a Scanning Electron Microscope (SEM) to test a micropillar produced by Focused Ion Beam (FIB) milling. Quasi-static pillar compression test and a fatigue (cyclic oscillation) test are shown at the end.

Alemnis Standard Assembly


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