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SCRATCH TESTING STAGE

SPA-LR1: SCRATCH PACKAGE LONG RANGE 1 (requires SCO-AUX-PORT, ECO-AUX-STS or ECO-AUX-PORT)

  • Scratch length up to 10 mm, speed up to 10 mm/s, normal and one axis lateral force measurement. Scratch in X or Y (LFS must be oriented accordingly)
  • If operating in a SEM, an additional feedthrough for the LSF must be installed. Please contact Alemnis for a quote.
  • This option uses the standard SmarAct stage

 

SPA-LR2: SCRATCH PACKAGE LONG RANGE 2 (requires SCO-AUX-PORT, ECO-AUX-STS or ECO-AUX-PORT)

  • Scratch length up to 10 mm, speed up to 1 mm/s, normal and one axis lateral force measurement. Scratch in X or Y (LFS must be oriented accordingly)
  • If operating in a SEM, an additional feedthrough for the LSF must be installed. Please contact Alemnis for a quote.
  • This option uses the standard SmarAct stage with low vibration mode

STS-HP: SCRATCH PACKAGE HIGH PRECISION (requires an ECO with ECO-AUX-STS or ECO-AUX-PORT)

  • Scratch length up to 40 µm, max frequency 5 Hz (reciprocating), high displacement resolution, normal and one axis lateral force measurement. Scratch in X axis only.
  • STS-20: Max. displacement range of 20 µm (0.6 nm resolution)
  • STS-40: Max. displacement range of 40 µm (1.2 nm resolution)
  • If operating in a SEM, additional feedthroughs for the force and displacement sensor, as well as for the displacement actuator must be installed. Please contact Alemnis for a quote.
  • STS-HP can be used with a VHS-1-3, UHS-1-3 or UHS-3-3 for scratch testing over a short time period (maximum 4 seconds)

Example of ASA mounted with VHS-1-3 and STS-HP options

Example of ASA mounted with Lateral Force Sensor (LFS) and STS-HP option.

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