SCRATCH TESTING STAGE

Alemnis offers three scratch test packages:

 

(i) SPA-LR1: SCRATCH PACKAGE LONG RANGE 1 (requires SCO-AUX-PORT, ECO-AUX-STS or ECO-AUX-PORT)

The SPA-LR1 consists of a Lateral Force Sensor (LFS) + AMICS-Scratch (scratching with micro-positioning stage).

  • Scratch length up to 10 mm, speed up to 10 mm/s, normal and one axis lateral force measurement. Scratch in X or Y (LFS must be oriented accordingly)

Notes:

  • If operating in a SEM, an additional feedthrough for the LSF must be installed. Please contact Alemnis for a quote.
  • This option uses the standard SmarAct stage

 

(ii) SPA-LR2: SCRATCH PACKAGE LONG RANGE 2 (requires SCO-AUX-PORT, ECO-AUX-STS or ECO-AUX-PORT)

The SPA-LR2 consists of a Lateral Force Sensor (LFS) + AMICS-Scratch (enhanced scratching performance with positioning stage and low vibration mode).

  • Scratch length up to 10 mm, speed up to 1 mm/s, normal and one axis lateral force measurement. Scratch in X or Y (LFS must be oriented accordingly)

Notes:

  • If operating in a SEM, an additional feedthrough for the LSF must be installed. Please contact Alemnis for a quote.
  • This option uses the standard SmarAct stage with low vibration mode

 

(iii) STS-HP: SCRATCH PACKAGE HIGH PRECISION (requires an ECO with ECO-AUX-STS or ECO-AUX-PORT)

The STS-HP consists of a Lateral Force Sensor (LFS) + AMICS-Scratch + Scratch Testing Stage (STS) and an external HV amplifier.

  • Scratch length up to 40 µm, max frequency 5 Hz (reciprocating), high displacement resolution, normal and one axis lateral force measurement. Scratch in X axis only.

The Scratch Testing Stage (STS) is available in two ranges:

  • STS-20: Max. displacement range of 20 µm (0.6 nm resolution)
  • STS-40: Max. displacement range of 40 µm (1.2 nm resolution)

Notes:

  • If operating in a SEM, additional feedthroughs for the force and displacement sensor, as well as for the displacement actuator must be installed. Please contact Alemnis for a quote.
  • STS-HP can be used with a VHS-1-3, UHS-1-3 or UHS-3-3 for scratch testing over a short time period (maximum 4 seconds)
  • This is the dedicated Scratch testing Stage.

Example of ASA mounted with STS-HP option

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Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.