This course has been developed to give attendees the background to perform Microsystem reliability characterization from the component to system levels. Initially, we present the fundamentals of mechanical, environmental, and reliability testing as applied to Microsystems. The focus begins with the characterization of single components and structures; these are illustrated with practical examples from industry. We apply these procedures to MEMS and Microsystem level reliability test applications. Test techniques, specifications, and methodology are presented in detail with examples from industry. Additionally, for courses taking place in Neuchatel, participants will see live demonstrations of typical testing techniques to enable them to apply these concepts to their own application area.

This course is designed for the practicing scientist or engineer to provide a foundation in surface mechanical properties characterisation and reliability testing of Microsystems and Micro-Electro Mechanical Systems (MEMS).

Run annually by FSRM (Swiss Federation for Research in Microtechnology):