ASA-Mechanical Electrical Probing (MEP)

Imina’s miBots integrated into ASA

The Alemnis Standard Assembly-Mechanical Electrical Probe (ASA-MEP) module enables simultaneous micromechanical and electrical testing by integrating the Alemnis Standard Assembly (ASA) with high-precision electrical probing via IMINA miBots. Designed for in-situ Scanning Electron Microscope (SEM) applications, the system facilitates high-resolution electromechanical measurements at the micro- and nanoscale.

The ASA-MEP module utilizes a Mini Load Cell (MLC) for precise force measurement, ensuring highly accurate mechanical testing while maintaining electrical isolation. It also employs an isolated tip and sample holder to minimize interference and ensure low-noise signal acquisition. The system is equipped with two miBot robots, offering four degrees of freedom with nanometer-scale resolution, enabling precise electrical contact formation. A vacuum-compatible SEM connection interface allows seamless electrical probing with low-current, low-noise measurement capabilities.

With its motion controller and dedicated software suite, the ASA-MEP module provides real-time control and high-precision manipulation, making it ideal for semiconductor device characterization, nanoelectronic reliability studies, and advanced material research. The module is designed for seamless integration into existing SEM environments, with on-site installation ensuring immediate operational readiness.