LATERAL FORCE SENSOR (LFS)
The LFS is a miniaturized load cell measuring lateral force. It can be oriented in the X or Y directions.
LFS-0.5: Load range up to 0.5 N (typ. 4 µN RMS noise)
Note: if operating in SEM, an additional feedthrough is required.
The LFS is often used in conjunction with the Scratch Testing Stage (STS).
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