P. Jenczyk; M. Michałowski; B. Warcholiński; M. Milczarek; A. Gilewicz
Advanced Engineering Materials 27 (2025) 2500243
Friction and wear are among the most crucial limiting factors for micro-
electro-mechanical systems reliability. In this article, it introduces a novel
approach to microtribological research by developing ultrastiff atomic force
microscopy (AFM) probes capable of applying millinewton-range normal loads.
This innovation enables friction measurements in operational ranges relevant to
microbearings, overcoming limitations ofconventional AFM probes. This article
investigates the tribological performance of zirconium carbide (ZrC) coatings,
fabricated via physical vapor deposition sputtering, in combination with various
microspherical counterfaces. Its findings reveal that ZrC coatings with high
carbon content exhibit coefficient of friction as low as 0.08 when paired with
borosilicate glass. Additionally, it provides insights into wear behavior, advancing
the selection of tribo-pairs for next-generation microbearings.