Microscale Fracture Behavior of Single Crystal Silicon Beams at Elevated Temperatures

B. N. Jaya; J. M. Wheeler; J. Wehrs; J. P. Best; R. Soler; J. Michler; C. Kirchlechner; G. Dehm

Nano Letters 16 (2016) 7597-7603

The micromechanical fracture behavior of Si [100] was investigated as a function of temperature in the scanning electron microscope with a nanoindenter. A gradual increase in KC was observed with temperature, in contrast to sharp transitions reported earlier for macro-Si. A transition in cracking mechanism via crack branching occurs at ∼300 °C accompanied by multiple load drops. This reveals that onset of small-scale plasticity plays an important role in the brittle-to-ductile transition of miniaturized Si.

DOI: https://doi.org/10.1021/acs.nanolett.6b03461