Fast micropillar compression mapping on a large array of silicon micropillars

Stunning example of fast micropillar compression mapping using the Alemnis ASA on a large array of Si micropillars of diameter 5.5 µm, height 15 µm and separation 75 µm. The measured elastic modulus values match literature values for Si, thus confirming that no compromise on test quality even at such high speeds..!
Such tests can be made with standard ASA, but also with the new Automated Large Sample Platform which can accommodate large samples or wafers up to 4” diameter.